Introduction

This document describes the usage and technical reference of the python program TXLWizard written by Esteban Marin ([email protected]).

What does it do?

The TXLWizard provides routines for generating TXL files (.txl) for the preparation of E-Beam lithography masks using python code. The TXL files can be processed with BEAMER. See the following links:

• http://genisys-gmbh.com/web/products/beamer.html

The TXLWizard currently implements version 4.8 of the TextLIB (TXL) standard.

The generated TXL files are also converted to HTML / SVG for presentation in any modern browser or vector graphics application and allow rapid mask development.

Moreover, a command line interface TXLConverter provides conversion of existing TXL files to HTML / SVG (See Section :ref:`sec-TXLConverter`).

Why should I use it?

TXL File Format:

• Text-based file format
• Can be generated with any scripting language (Python / Matlab / etc.)
• Easy to use
• Optimized E-Beam Performance due to References to objects and array of replicated objects (SREF, AREF)

TXLWizard:

• Create masks with well-structured scripts
• Flexible Python Scripting
• Mask-Code easy to read and reusable
• Automated label generation

TXLConverter:

• Easily view .txl files with any web browser
• Zoom / Pan
• Rapid conversion for efficient mask development

Quickstart / Documentation

See the Presentation_Slides and the documentation at https://bithost-gmbh.github.io/txlwizard/

Installation

The TXLWizard is written in python and will run in Python version 2.7+ and 3.1+.

In order to use it, the TXLWizard package must be available as a python package, i.e. either it must be copied to :file:`Path_to_my_python_installation/site-packages/` or to the path where your script is located.

Alternatively, you can also prepend the following command to your python script:

import sys
sys.path.append('path_to_the_folder_containing_TXLWizard')

Please note that this must be the parent folder containing the TXLWizard.

Structure / Pattern / Attribute

The following terms are used throughout this manual:

Structure

Refers to an object containing one or more Pattern objects. A Structure corresponds to the STRUCT command in TXL files.

Pattern

Refers to a pattern such as a circle, a polygon, an ellipse, a path, etc. The following patterns with the corresponding TXL command in brackets are supported:

• Circle (C)
• Ellipse (ELP)
• Polygon (B)
• Polyline (P)
• Reference (SREF)
• Array (AREF)

For more information, supported parameters, etc., see Section :ref:`PythonModuleReferencePatterns`.

Attribute

Refers to an property of a Pattern determining the visual appearance of the Pattern. The following attributes with the corresponding TXL command in brackets are supported:

• Layer (LAYER)
• DataType (DATATYPE)
• RotationAngle (ANGLE)
• StrokeWidth (WIDTH)
• ScaleFactor (MAG)

Please note that the TXLWizard strictly implements the specification of the TXL format. This implies some peculiarities, such as

• Attribute commands preceed the corresponding Pattern in a Structure and are valid for all patterns that follow unless the attribute value is changed. Therefore, when adding a Pattern to a Structure with certain attributes, the attributes are valid for any subsequently added pattern, unless a different attribute value is specified.
• Attribute commands are valid for all patterns, except for Reference (SREF) and Array (AREF). Therefore the attributes of a pattern can only be specified in the structure where the pattern is added / defined.
• The RotationAngle attribute applies to each Pattern individually and rotates about each Pattern's individual origin.

Example SVG Output

An example output can be seen here:

Example SVG output for a mask

How to start?

Have a look at the examples in https://bithost-gmbh.github.io/txlwizard/Chapters/20_Examples.html and consult the https://bithost-gmbh.github.io/txlwizard/Chapters/40_PythonModuleReference.html. Happy scripting!

TXLConverter

For existing TXL files, there is a command line interface script that converts them to SVG / HTML files.

Usage

The usage is very simple. Simply run the python script Tools/TXLConverterCLI.py. The command line interface will allow you to change the configuration as you wish. Furthermore, the configuration is saved and restored for a subsequent run.

Code

To use the TXLConverter from the command line type

python Tools/TXLConverterCLI.py

Or if you want to call it in your own python script do

import TXLWizard.TXLConverter
TXLConverterCLI = TXLWizard.TXLConverter.TXLConverterCLI()

The resulting command line interface looks as follows:

### TXL Converter v1.6 ###
Converts TXL Files to SVG/HTML
written by Esteban Marin ([email protected])


Full TXL File / Folder Path
If the path is a folder, you can enter the filename separately.
[/home/john.mega/masks]:
/Users/esteban/Desktop/masks2/tmpd/EM160225_GOI_CornerCube_Microbridge.txl

SampleWidth in um
used to draw coordinate system
[1500]:

SampleHeight in um
used to draw coordinate system
[1500]:

Layers to process
comma-separated, e.g. 1,4,5. Type -1 for all layers.
[-1]:

Do Conversion (y/n)? [y]

Files written:
/Users/esteban/Desktop/masks2/tmpd/EM160225_GOI_CornerCube_Microbridge.html
/Users/esteban/Desktop/masks2/tmpd/EM160225_GOI_CornerCube_Microbridge.svg

Done